1/17/2010	5:15:38 PM	Bypass valve closed
1/17/2010	5:15:39 PM	Main Vac valve closed
1/17/2010	5:15:57 PM	Bypass valve opened
1/17/2010	5:15:58 PM	Main Vac valve opened
1/17/2010	5:43:30 PM	Bypass solenoid MFC set to  760.000000
1/17/2010	5:43:33 PM	Main Vac valve closed
1/17/2010	5:43:55 PM	Helium MFC set to  500.000000
1/17/2010	5:43:58 PM	Helium valve opened
1/17/2010	5:45:23 PM	Helium valve closed
1/17/2010	5:45:32 PM	Bypass valve closed
1/17/2010	5:52:19 PM	Bypass solenoid MFC set to  0.000000
1/17/2010	5:52:22 PM	Bypass valve opened
1/17/2010	5:53:00 PM	Main Vac valve opened
1/17/2010	5:54:46 PM	Helium valve opened
1/17/2010	5:56:08 PM	Helium valve closed
1/17/2010	5:57:55 PM	Main Vac valve closed
1/17/2010	5:57:57 PM	Bypass valve closed
1/17/2010	5:58:18 PM	Bypass valve opened
1/17/2010	5:58:20 PM	Main Vac valve opened
1/17/2010	6:11:35 PM	Main Vac valve closed
1/17/2010	6:11:38 PM	Bypass valve closed
1/17/2010	6:12:28 PM	Bypass solenoid MFC set to  760.000000
1/17/2010	6:12:35 PM	Helium valve opened
1/17/2010	6:13:56 PM	Bypass valve opened
1/17/2010	6:14:08 PM	Bypass valve closed
1/17/2010	6:14:11 PM	Bubbler valve opened
1/17/2010	6:14:43 PM	Bubbler valve closed
1/17/2010	6:14:46 PM	Bypass valve opened
1/17/2010	6:17:45 PM	Bypass solenoid MFC set to  760.000000
1/17/2010	6:17:54 PM	Bypass valve closed
1/17/2010	6:17:58 PM	Bubbler valve opened
1/17/2010	6:35:12 PM	Bubbler valve closed
1/17/2010	6:35:16 PM	Bypass valve opened
1/17/2010	6:35:33 PM	Helium MFC set to  100.000000
1/17/2010	6:35:45 PM	Helium MFC set to  50.000000
1/17/2010	7:12:37 PM	Helium valve closed
1/17/2010	7:12:40 PM	Bypass valve closed
1/17/2010	7:20:45 PM	Bypass solenoid MFC set to  0.000000
1/17/2010	7:20:47 PM	Bypass valve opened
1/17/2010	7:21:19 PM	Main Vac valve opened
1/17/2010	7:27:58 PM	Main Vac valve closed
1/17/2010	7:28:07 PM	Bypass solenoid MFC set to  0.000000
1/17/2010	7:28:09 PM	Helium valve opened
1/17/2010	7:28:20 PM	Bypass solenoid MFC set to  760.000000
1/17/2010	7:29:17 PM	Helium MFC set to  500.000000
1/17/2010	7:30:35 PM	Bypass valve closed
1/17/2010	7:30:38 PM	Bubbler valve opened
1/17/2010	7:30:58 PM	Helium MFC set to  500.000000
1/17/2010	7:31:10 PM	Helium MFC set to  400.000000
1/17/2010	7:31:23 PM	Helium MFC set to  500.000000
1/17/2010	7:57:33 PM	Bubbler valve closed
1/17/2010	7:57:36 PM	Bypass valve opened
1/17/2010	7:57:41 PM	Helium MFC set to  50.000000
1/17/2010	8:11:44 PM	Bypass solenoid MFC set to  0.000000
1/17/2010	8:11:46 PM	Helium valve closed
1/17/2010	8:12:09 PM	Main Vac valve opened
1/17/2010	10:52:09 PM	Main Vac valve closed
1/17/2010	10:52:15 PM	Bypass solenoid MFC set to  760.000000
1/17/2010	10:52:18 PM	Helium valve opened
1/17/2010	10:52:38 PM	Helium MFC set to  500.000000
1/17/2010	10:53:58 PM	Helium valve closed
1/17/2010	10:54:01 PM	Bypass valve closed
1/17/2010	10:57:09 PM	Bypass solenoid MFC set to  0.000000
1/17/2010	10:57:10 PM	Bypass valve opened
1/17/2010	10:57:40 PM	Main Vac valve opened
